Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Anti-reflective coating for transparent end effectors

Anti-reflective coating for transparent end effectors

US Patent 10669430 · Granted Jun 2, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Contactless workpiece temperature sensor2022
Batch heating and cooling chamber or loadlock2022
Buffer chamber wafer heating mechanism and supporting robots2022
Modular LED heater2021
System and apparatus for process chamber window cooling2021
Buffer chamber wafer heating mechanism and supporting robots2020
Silicon carbide substrate heating2020
Batch LED heating and cooling chamber or loadlock2019
Buffer chamber wafer heating mechanism and supporting robot2018
System and method to monitor semiconductor workpiece temperature using thermal i2018
Self-damping end effector2018
Electrostatic chuck with LED heating2017