Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Polishing of electrostatic substrate support geometries

Polishing of electrostatic substrate support geometries

US Patent 10654147 · Granted May 19, 2020

Estimated economic value: $40,373,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate support with real time force and film stress control2025
Electrostatic chuck with improved temperature control2025
Forming mesas on an electrostatic chuck2024
Substrate support with real time force and film stress control2024
Methods, systems, and apparatus for conducting chucking operations using an adju2023
Chamber component with protective ceramic coating containing yttrium, aluminum a2023
Forming mesas on an electrostatic chuck2023
Substrate support with real time force and film stress control2023
Polishing jig assembly for a new or refurbished electrostatic chuck2023
Substrate support assembly with deposited surface features2022
Substrate chucking and dechucking methods2021
Substrate chucking and dechucking methods2021