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Home › Metal-compound-removing solvent and method in lithography

Metal-compound-removing solvent and method in lithography

US Patent 10622211 · Granted Apr 14, 2020

Estimated economic value: $9,665,000 ⓘ

Assignee

TSMC

Inventors

An-Ren Zi (64 patents)
Joy Cheng (77 patents)
Ching-Yu Chang (432 patents)

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