Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and apparatuses for plasma chamber matching and fault identification

Methods and apparatuses for plasma chamber matching and fault identification

US Patent 10607815 · Granted Mar 31, 2020

Estimated economic value: $21,055,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for controlling edge ring variation2025
Yttrium oxide based coating composition2024
Apparatus and method for controlling edge ring variation2023
Yttrium oxide based coating composition2023
Pulse system verification2021
Pulse system verification2021
Eco-efficiency characterization tool2021
Methods and apparatus for detecting an endpoint of a seasoning process2021
Processing chamber hardware fault detection using spectral radio frequency analy2020
Processing chamber hardware fault detection using spectral radio frequency analy2020
Processing chamber hardware fault detection using spectral radio frequency analy2020
Gas panel apparatus and method for reducing exhaust requirements2019