Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Silicon carbide microelectromechanical structure, device, and method

Silicon carbide microelectromechanical structure, device, and method

US Patent 10589983 · Granted Mar 17, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

β-Ga2O3 junction barrier Schottky (JBS) diodes with sputtered p-type NiO2025
Selective area diffusion doping of III-N materials2025
Selective area diffusion doping of III-N materials2025
Systems and methods for growth of silicon carbide over a layer comprising graphe2025
Polarization-engineered heterogeneous semiconductor heterostructures2025
Multi-layer hybrid edge termination for III-N power devices2025
Low resistance photoconductive semiconductor switch (PCSS)2025
Low resistance photoconductive semiconductor switch (PCSS)2025
Polarization-engineered heterogeneous semiconductor heterostructures2025
Silicon MEMS gyroscopes with upper and lower sense plates2024
Silicon MEMS gyroscopes with upper and lower sense plates2024
Silicon MEMS gyroscopes with upper and lower sense plates2024