Crystalline film, semiconductor device including crystalline film, and method for producing crystalline film

Assignee

• Flosfia
• National Institute For Materials Science
• Kyoto University
• Saga University

Inventors

• Yuichi Oshima (32 patents)
• Shizuo Fujita (16 patents)
• Kentaro Kaneko (53 patents)
• Makoto Kasu (7 patents)
• Katsuaki KAWARA (4 patents)
• Takashi Shinohe (129 patents)
• Tokiyoshi Matsuda (13 patents)
• Toshimi Hitora (36 patents)

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