Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for measuring positions of structures on a substrate and computer program product for determining positions of structures on a substrate

Method for measuring positions of structures on a substrate and computer program product for determining positions of structures on a substrate

US Patent 10337852 · Granted Jul 2, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Image modeling-assisted contour extraction2025
Target and algorithm to measure overlay by modeling back scattering electrons on2024
Device feature specific edge placement error (EPE)2024
Design-assisted large field of view metrology2024
Multi-stage, multi-zone substrate positioning systems2023
Metrology and control of overlay and edge placement errors2020
Overlay measurements of overlapping target structures based on symmetry of scann2019
Systems and methods for device-correlated overlay metrology2019
Method and computer program product for controlling the positioning of patterns 2019
Apparatus and method for the measurement of pattern placement and size of patter2019
Measurement of overlay and edge placement errors with an electron beam column ar2018
System and method for drift compensation on an electron beam based characterizat2018