Apparatus for depositing a thin film

Assignee

• Samsung

Inventors

• Seung-min Ryu (66 patents)
• Sang Min Lee (367 patents)
• HEE JONG JEONG (3 patents)
• Chaeho Kim (12 patents)
• Ji Su Son (1 patents)
• Jaebong Lee (8 patents)
• Juwan Lim (5 patents)
• Jungwoo Choi (53 patents)

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