Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6687013 | Laser interferometer displacement measuring system, exposure apparatus, and electron beam lithography apparatus | Fumio Isshiki, Masakazu Sugaya, Tatsundo Suzuki, Sumio Hosaka | 2004-02-03 |
| 5065034 | Charged particle beam apparatus | Yoshimi Kawanami, Tsuyoshi Ohnishi, Tohru Ishitani, Tooru Habu | 1991-11-12 |