Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7501213 | Method for forming generating mask data | — | 2009-03-10 |
| 7468240 | Patterning method using photomask | — | 2008-12-23 |
| 7449285 | Method for forming pattern | — | 2008-11-11 |
| 7404165 | Method for planning layout for LSI pattern, method for forming LSI pattern and method for generating mask data for LSI | Shinji Odanaka | 2008-07-22 |
| 7378198 | Photomask | — | 2008-05-27 |
| 7364822 | Photomask, method for forming the same, and method for forming pattern using the photomask | — | 2008-04-29 |
| 7361436 | Pattern formation method | — | 2008-04-22 |
| 7337423 | Mask pattern generating method and mask pattern generating apparatus | Minoru Yamagiwa, Tadashi Tanimoto, Reiko Hinogami | 2008-02-26 |
| 7332250 | Photomask | — | 2008-02-19 |
| 7282309 | Photomask, method for producing the same, and method for forming pattern using the photomask | — | 2007-10-16 |
| 7250248 | Method for forming pattern using a photomask | — | 2007-07-31 |
| 7205077 | Method for producing photomask and method for producing photomask pattern layout | — | 2007-04-17 |
| 7147975 | Photomask | — | 2006-12-12 |
| 7144684 | Method for forming pattern using photomask | — | 2006-12-05 |
| 7103870 | Method for planning layout for LSI pattern, method for forming LSI pattern and method for generating mask data for LSI | Shinji Odanaka | 2006-09-05 |
| 7060395 | Photomask, method for forming the same,and method for designing mask pattern | — | 2006-06-13 |
| 7060398 | Photomask, method for producing the same, and method for forming pattern using the photomask | — | 2006-06-13 |
| 7045255 | Photomask and method for producing the same | — | 2006-05-16 |
| 7001711 | Patterning method using a photomask | — | 2006-02-21 |
| 7001694 | Photomask and method for producing the same | — | 2006-02-21 |
| 6977133 | Photomask and pattern forming method | Taichi Koizumi | 2005-12-20 |
| 6703168 | Photomask | — | 2004-03-09 |
| 6691297 | Method for planning layout for LSI pattern, method for forming LSI pattern and method for generating mask data for LSI | Shinji Odanaka | 2004-02-10 |
| 5421934 | Dry-etching process simulator | Kenji Harafugi, Masafumi Kubbota, Noboru Nomura | 1995-06-06 |
| 5182718 | Method and apparatus for writing a pattern on a semiconductor sample based on a resist pattern corrected for proximity effects resulting from direct exposure of the sample by a charged-particle beam or light | Kenji Harafuji, Hiromitsu Hamaguchi, Kenji Kawakita | 1993-01-26 |