Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7521702 | Extreme ultraviolet light source and extreme ultraviolet light source target | Keiji Nagai, Hiroaki Nishimura, Takayoshi Norimatsu, Katsunobu Nishihara, Noriaki Miyanaga +13 more | 2009-04-21 |
| 6676264 | Laser beam focusing apparatus and method for focusing a laser beam | Kunioki Mima, Ryosuke Kodama, Yoneyoshi Kitagawa, Kazuo Tanaka, Yasuhiko Sentoku | 2004-01-13 |