Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191343 | Semiconductor device and method of manufacturing semiconductor device | — | 2025-01-07 |
| 11610962 | Semiconductor device and method of manufacturing semiconductor device | — | 2023-03-21 |
| 7972752 | Photomask and method for forming a resist pattern | — | 2011-07-05 |
| 7771897 | Photomask for forming a resist pattern and manufacturing method thereof, and resist-pattern forming method using the photomask | — | 2010-08-10 |
| 6956641 | Method of forming resist pattern, and exposure device | — | 2005-10-18 |
| 6838643 | Method and apparatus for performing baking treatment to semiconductor wafer | Shouzou Kobayashi, Keisuke Tanaka, Kouhei Shimoyama, Akira Watanabe, Tadashi Nishimuro +3 more | 2005-01-04 |
| 6511794 | Method of forming resist pattern, and exposure device | — | 2003-01-28 |
| 6455438 | Fabrication method for a semiconductor device | Azusa Yanagisawa, Koki Muto, Tadashi Nishimuro, Katsuo Oshima, Akira Watanabe +4 more | 2002-09-24 |