Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11867433 | Temperature regulation device and temperature regulation method | Koji Maeda, Masato Horikoshi, Tomomi Nakazato | 2024-01-09 |
| 6838643 | Method and apparatus for performing baking treatment to semiconductor wafer | Shouzou Kobayashi, Takamitsu Furukawa, Keisuke Tanaka, Akira Watanabe, Tadashi Nishimuro +3 more | 2005-01-04 |
| 6455438 | Fabrication method for a semiconductor device | Azusa Yanagisawa, Koki Muto, Tadashi Nishimuro, Katsuo Oshima, Akira Watanabe +4 more | 2002-09-24 |