Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355859 | Stacked chips with through electrodes | — | 2016-05-31 |
| 7670922 | Method of measuring alignment of measurement pattern | Hiroyuki Yusa, Toshifumi Kikuchi, Akihiro Makiuchi | 2010-03-02 |
| 6838643 | Method and apparatus for performing baking treatment to semiconductor wafer | Shouzou Kobayashi, Takamitsu Furukawa, Keisuke Tanaka, Kouhei Shimoyama, Akira Watanabe +3 more | 2005-01-04 |
| 6455438 | Fabrication method for a semiconductor device | Koki Muto, Tadashi Nishimuro, Katsuo Oshima, Akira Watanabe, Akihiko Nara +4 more | 2002-09-24 |