Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6150258 | Plasma deposited fluorinated amorphous carbon films | Michael J. Shapiro | 2000-11-21 |
| 6054206 | Chemical vapor deposition of low density silicon dioxide films | — | 2000-04-25 |
| 5872058 | High aspect ratio gapfill process by using HDP | Patrick A. Van Cleemput | 1999-02-16 |
| 5810933 | Wafer cooling device | James C. Wing | 1998-09-22 |