Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5225024 | Magnetically enhanced plasma reactor system for semiconductor processing | Peter R. Hanley, Stephen E. Savas, Neeta Jha, Kevin G. Donohoe | 1993-07-06 |
| 5183775 | Method for forming capacitor in trench of semiconductor wafer by implantation of trench surfaces with oxygen | — | 1993-02-02 |
| 5126008 | Corrosion-free aluminum etching process for fabricating an integrated circuit structure | — | 1992-06-30 |
| 5126231 | Process for multi-layer photoresist etching with minimal feature undercut and unchanging photoresist load during etch | — | 1992-06-30 |