Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7001854 | Hydrogen-based phosphosilicate glass process for gap fill of high aspect ratio structures | George D. Papasouliotis, Md Sazzadur Rahman, Pin Sheng Sun, Lauren Hall, Vikram Singh | 2006-02-21 |