Issued Patents All Time
Showing 51–51 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6030881 | High throughput chemical vapor deposition process capable of filling high aspect ratio structures | Ashima B. Chakravarti, Richard A. Conti, Laertis Economikos, Patrick A. Van Cleemput | 2000-02-29 |