Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5438415 | Ellipsometer and method of controlling coating thickness therewith | Akira Kazama, Takahiko Oshige, Yoshiro Yamada, Takeo Yamada, Takeshi Yamazaki +1 more | 1995-08-01 |