Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9023588 | Resist underlayer film forming composition containing silicon having nitrogen-containing ring | Makoto Nakajima, Yuta Kanno | 2015-05-05 |
| 8864894 | Resist underlayer film forming composition containing silicone having onium group | Makoto Nakajima, Yuta Kanno | 2014-10-21 |
| 8835093 | Resist underlayer film forming composition containing silicon having anion group | Makoto Nakajima, Yuta Kanno | 2014-09-16 |
| 8828879 | Silicon-containing composition having sulfonamide group for forming resist underlayer film | Yuta Kanno, Makoto Nakajima | 2014-09-09 |
| 8815494 | Resist underlayer film forming composition containing silicon having anion group | Makoto Nakajima, Yuta Kanno | 2014-08-26 |
| 8426112 | Resist underlayer film forming composition containing polymer having nitrogen-containing silyl group | Makoto Nakajima, Yuta Kanno | 2013-04-23 |