Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521538 | Method of forming a trench with a rounded bottom in a semiconductor device | Hajime Soga, Kenji Kondo, Eiji Ishikawa, Mikimasa Suzuki | 2003-02-18 |
| 6090718 | Dry etching method for semiconductor substrate | Hajime Soga, Kenji Kondo, Eiji Ishikawa, Yuji Ichikawa | 2000-07-18 |
| 5871659 | Dry etching process for semiconductor | Kenji Kondo, Hajime Soga, Yasuo Ishihara, Yoshifumi Okabe | 1999-02-16 |
| 5522966 | Dry etching process for semiconductor | Atsushi Komura, Kenji Kondo, Keiichi Kon, Tetsuhiko Sanbei, Shoji Miura | 1996-06-04 |
| 5423941 | Dry etching process for semiconductor | Atsushi Komura, Kenji Kondo, Keiichi Kon, Tetsuhiko Sanbei, Shoji Miura | 1995-06-13 |