Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5522966 | Dry etching process for semiconductor | Atsushi Komura, Yoshikazu Sakano, Kenji Kondo, Tetsuhiko Sanbei, Shoji Miura | 1996-06-04 |
| 5423941 | Dry etching process for semiconductor | Atsushi Komura, Yoshikazu Sakano, Kenji Kondo, Tetsuhiko Sanbei, Shoji Miura | 1995-06-13 |