Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10626205 | Method for producing copolymer | Kakuei Ozawa | 2020-04-21 |
| 6309795 | Resist composition | Nobukazu Takahashi | 2001-10-30 |
| 6010826 | Resist composition | Shugo Matsuno, Hideyuki Tanaka, Tatsuya Sugimoto, Yasumasa Wada | 2000-01-04 |
| 5773190 | Resist composition | Masayuki Oie, Hideyuki Tanaka | 1998-06-30 |
| 5707784 | Method of forming chemically amplified resist pattern and manufacturing for semiconductor device by using the chemically amplified resist pattern | Akira Oikawa, Hiroyuki Tanaka, Masayuki Oie, Hideyuki Tanaka | 1998-01-13 |
| 5688628 | Resist composition | Masayuki Oie, Hideyuki Tanaka, Akira Oikawa, Shuichi Miyata | 1997-11-18 |