Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5414746 | X-ray exposure mask and fabrication method thereof | Yoh Somemura, Kazunori Miyoshi, Tadahito Matsuda | 1995-05-09 |
| 4656347 | Diffraction grating position adjuster using a grating and a reflector | Atsunobu Une, Makoto Iki, Nobuyuki Takeuchi | 1987-04-07 |