Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5241183 | Vertical XY stage | Munenori Kanai, Sunao Ishihara | 1993-08-31 |
| 5000573 | Method of alignment with the use of diffraction gratings and an apparatus therefor | Masanori Suzuki, Makoto Iki | 1991-03-19 |
| 4656347 | Diffraction grating position adjuster using a grating and a reflector | Makoto Iki, Nobuyuki Takeuchi, Kimiyoshi Deguchi | 1987-04-07 |