Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7204887 | Wafer holding, wafer support member, wafer boat and heat treatment furnace | Keisuke Kawamura, Tsutomu Sasaki, Atsuki Matsumura, Atsushi Ikari, Yoshiharu Inoue +2 more | 2007-04-17 |
| 7084459 | SOI substrate | Tsutomu Sasaki, Atsuki Matsumura | 2006-08-01 |
| 6617034 | SOI substrate and method for production thereof | Atsushi Ikari, Atsuki Matsumura, Keisuke Kawamura, Takayuki Yano, Yoichi Nagatake | 2003-09-09 |
| 5918151 | Method of manufacturing a semiconductor substrate and an apparatus for manufacturing the same | Masaharu Tachimori, Takayuki Yano, Tatsuo Nakajima | 1999-06-29 |
| 5534446 | Process for producing buried insulator layer in semiconductor substrate | Masaharu Tachimori, Takayuki Yano, Yasuo Tsumori, Tatsuo Nakajima | 1996-07-09 |