Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5918151 | Method of manufacturing a semiconductor substrate and an apparatus for manufacturing the same | Takayuki Yano, Isao Hamaguchi, Tatsuo Nakajima | 1999-06-29 |
| 5534446 | Process for producing buried insulator layer in semiconductor substrate | Takayuki Yano, Yasuo Tsumori, Tatsuo Nakajima, Isao Hamaguchi | 1996-07-09 |
| 5373804 | Single silicon crystal having low OSF density induced by oxidation and method for production thereof | Tadashi Sakon, Takayuki Kaneko, Seizou Meguro | 1994-12-20 |
| 5189508 | Silicon wafer excelling in gettering ability and method for production thereof | Kazunori Ishizaka, Hideo Araki | 1993-02-23 |