Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9855654 | Power assist robot apparatus and control method therefor | Eiichi Yagi, Motonobu Sato | 2018-01-02 |
| 7148900 | CCM calculating system, CCM calculating method and recording medium | Fumiyoshi Saito, Osamu Kobayashi | 2006-12-12 |
| 7148948 | Scanning exposure apparatus, and device manufacturing method | — | 2006-12-12 |
| 7027186 | Method for evaluating reproducibility of toning sample by CCM | Fumiyoshi Saito, Yasaku Watanabe, Eiko Fujiyama | 2006-04-11 |
| 6891615 | Conical diffraction grazing incidence spectrometer and diffraction grating for use in the spectrometer | Masato Koike, Yoshihisa Harada | 2005-05-10 |
| 6844973 | Plane diffraction grating based on surface normal rotation and its application to an optical system | Masato Koike, Yoshihisa Harada | 2005-01-18 |
| 6577381 | Projection exposure apparatus, and device manufacturing method using the same | — | 2003-06-10 |
| 6323937 | Projection exposure apparatus, and device manufacturing method using the same | — | 2001-11-27 |
| 5740079 | Method for determining colorimetric value | Yoshihiro Shigemori, Tomio Saito, Fumiyoshi Saito, Tomiko Yoshida | 1998-04-14 |
| 5363238 | Diffraction grating | Yasuhiro Akune, Kichiya Tanino, Masaru Koeda, Tetsuya Nagano, Eiji Ishiguro | 1994-11-08 |
| 5293922 | Process for manufacturing gas flow unit | Kiwamu Imai, Masami Sayama, Kazuyuki Higashino, Yasunori Omori, Hoshiro Tani +1 more | 1994-03-15 |
| 4850711 | Film thickness-measuring apparatus using linearly polarized light | Takao Miyazaki, Yoshiro Yamada | 1989-07-25 |
| 4848912 | Apparatus for measuring a shape | Mitsuaki Uesugi, Masami Harayama, Yoshihiro Okuno, Hiroshi Matsunaga, Yoichi Matsuju | 1989-07-18 |
| 4716459 | Fatigue crack position detection apparatus | Eiichi Makabe, Mitsuaki Uesugi, Masaichi Inomata, Kyusuke Maruyama, Kenji Iwai | 1987-12-29 |
| 4380393 | Grazing incidence spectrometer | Hiroshi Nagata, Jiro Morimoto, Makoto Shiho | 1983-04-19 |
| 4309902 | Method for continuously measuring steepness of defective flatness of metal strip during rolling | Katsujiro Watanabe, Seigo Ando | 1982-01-12 |