Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5891806 | Proximity-type microlithography apparatus and method | Masato Shibuya, Akira Miyaji, Toshiyuki Namikawa, Takashi Mori | 1999-04-06 |
| 4769523 | Laser processing apparatus | Akikazu Tanimoto, Joji Iwamoto, Hiroshi Shirasu, Kiyoto Mashima | 1988-09-06 |
| 4712910 | Exposure method and apparatus for semiconductor fabrication equipment | — | 1987-12-15 |
| 4512657 | Exposure control system | — | 1985-04-23 |