Issued Patents All Time
Showing 51–52 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429090 | Fiducial mark bodies for charged-particle-beam (CPB) microlithography, methods for making same, and CPB microlithography apparatus comprising same | Noriyuki Hirayanagi | 2002-08-06 |
| 6287876 | Reticle-substrate alignment methods for charged-particle-beam microlithography, and associated semiconductor-device manufacturing methods | — | 2001-09-11 |