Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5981947 | Apparatus for detecting or collecting secondary electrons, charged-particle beam exposure apparatus comprising same, and related methods | Mamoru Nakasuji, Teruaki Okino | 1999-11-09 |
| 5847813 | Mask holder for microlithography exposure | — | 1998-12-08 |