Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6151105 | Exposure apparatus having dynamically isolated support structure | — | 2000-11-21 |
| 6150787 | Exposure apparatus having dynamically isolated reaction frame | — | 2000-11-21 |
| 6132091 | X-Y stage with arcuate surface bearings | Michael Sogard | 2000-10-17 |
| 6130490 | X-Y stage with movable magnet plate | — | 2000-10-10 |
| 6087797 | Exposure method, and method of making exposure apparatus having dynamically isolated reaction frame | — | 2000-07-11 |
| 6049186 | Method for making and operating an exposure apparatus having a reaction frame | — | 2000-04-11 |
| 6020710 | Exposure method, and method of making exposure apparatus having dynamically isolated reaction frame | — | 2000-02-01 |
| 6008500 | Exposure apparatus having dynamically isolated reaction frame | — | 1999-12-28 |
| 5982128 | Lithography apparatus with movable stage and mechanical isolation of stage drive | — | 1999-11-09 |
| 5942871 | Double flexure support for stage drive coil | — | 1999-08-24 |
| 5874820 | Window frame-guided stage mechanism | — | 1999-02-23 |
| 5838450 | Direct reticle to wafer alignment using fluorescence for integrated circuit lithography | John H. McCoy, Kyoichi Suwa | 1998-11-17 |
| 5744924 | Guideless stage with isolated reaction frame | — | 1998-04-28 |
| 5708505 | Laser interferometer having a sheath for the laser beam | Michael Sogard | 1998-01-13 |
| 5552888 | Apparatus for measuring position of an X-Y stage | Michael Sogard | 1996-09-03 |
| 5528118 | Guideless stage with isolated reaction stage | — | 1996-06-18 |
| 4444492 | Apparatus for projecting a series of images onto dies of a semiconductor wafer | — | 1984-04-24 |
| 4425037 | Apparatus for projecting a series of images onto dies of a semiconductor wafer | Ronald S. Hershel | 1984-01-10 |