Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816805 | Compensation for Goos-Hanchen error in autofocus systems | Daniel Gene Smith | 2017-11-14 |
| 9810530 | Autofocus system and method | Daniel Gene Smith | 2017-11-07 |
| 9638799 | Scan mirrors for laser radar | Daniel Gene Smith, Alexander Cooper, Mina Rezk, Anthony R. Slotwinski, Thomas M. Hedges | 2017-05-02 |
| 9625368 | Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure | David M. Williamson, Daniel Gene Smith, Michel Pharand, Alexander Cooper, Alec Paul Robertson +1 more | 2017-04-18 |
| 9618619 | Radar systems with dual fiber coupled lasers | Mina Rezk, Anthony R. Slotwinski, Daniel Gene Smith, Alexander Cooper, Thomas M. Hedges | 2017-04-11 |
| 9605948 | Minimization of Abbe error caused by tip or tilt between an encoder head and a wafer stage for arbitrary location of a center of rotation | Zhiqiang Liu | 2017-03-28 |
| 9534934 | High resolution encoder head | — | 2017-01-03 |
| 9360347 | Two-dimensional encoder system and method | Daniel Gene Smith | 2016-06-07 |
| 9291918 | Light source assembly that generates heterodyne output beams | — | 2016-03-22 |
| 9243896 | Two axis encoder head assembly | — | 2016-01-26 |
| 9243901 | Rules for reducing the sensitivity of fringe projection autofocus to air temperature changes | Daniel Gene Smith | 2016-01-26 |
| 9237261 | Apparatus and method for improving contrast detected in a fringe projection autofocus system | — | 2016-01-12 |
| 9213227 | Custom color or polarization sensitive CCD for separating multiple signals in autofocus projection system | Daniel Gene Smith | 2015-12-15 |
| 9194694 | Interferometer devices for determining initial position of a stage or the like | — | 2015-11-24 |
| 9097851 | System and method for compensating instability in an autofocus system | Daniel Gene Smith, Michael Sogard | 2015-08-04 |
| 9074911 | Measurement system and method utilizing high contrast encoder head for measuring relative movement between objects | Daniel Gene Smith | 2015-07-07 |
| 9030668 | Method for spatially multiplexing two or more fringe projection signals on a single detector | Daniel Gene Smith | 2015-05-12 |
| 8993974 | Color time domain integration camera having a single charge coupled device and fringe projection auto-focus system | — | 2015-03-31 |
| 8829420 | Two dimensional encoder system and method | Daniel Gene Smith | 2014-09-09 |
| 8736813 | Exposure apparatus with an illumination system generating multiple illumination beams | Daniel Gene Smith | 2014-05-27 |
| 8724095 | Optical assembly for laser radar | Daniel Gene Smith, Brian L. Stamper, Alexander Cooper, Alec Paul Robertson | 2014-05-13 |