Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5838112 | Parallel scan type ion implanter | Yuzo Sakurada, Kouichi Niikura, Yasuo Mihara | 1998-11-17 |
| 5734163 | Zero method of controlling quadrupole mass spectrometer and control circuit arrangement to carry out this method | Tomonao Hayashi, Toshio Koike, Takashi Kawashima | 1998-03-31 |
| 5106470 | Method and device for controlling an electromagnet for a magnetron sputtering source | Hiromichi Takei, Hidenori Suwa, Shinichi Ono | 1992-04-21 |
| 5028795 | Ion implantation apparatus | Yuzo Sakurada | 1991-07-02 |
| 4983850 | Ion implantation device | Yuzo Sakurada, Kazuhiro Kashimoto | 1991-01-08 |
| 4942342 | Parallel sweeping system for electrostatic sweeping ion implanter | — | 1990-07-17 |
| 4611121 | Magnet apparatus | Masao Miyamura, Yoshio Kamata, Shoji Aiba | 1986-09-09 |