Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5106470 | Method and device for controlling an electromagnet for a magnetron sputtering source | Hidenori Suwa, Shinichi Ono, Osamu Tsukakoshi | 1992-04-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5106470 | Method and device for controlling an electromagnet for a magnetron sputtering source | Hidenori Suwa, Shinichi Ono, Osamu Tsukakoshi | 1992-04-21 |