Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8393460 | Vacuum apparatus and method for conveying substrate | Toshiyuki Koizumi | 2013-03-12 |
| 5838112 | Parallel scan type ion implanter | Osamu Tsukakoshi, Yuzo Sakurada, Yasuo Mihara | 1998-11-17 |