Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869791 | Vacuum processing apparatus | Dai Takagi, Yuu Mizushima | 2024-01-09 |
| 8393460 | Vacuum apparatus and method for conveying substrate | Kouichi Niikura | 2013-03-12 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869791 | Vacuum processing apparatus | Dai Takagi, Yuu Mizushima | 2024-01-09 |
| 8393460 | Vacuum apparatus and method for conveying substrate | Kouichi Niikura | 2013-03-12 |