Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5953629 | Method of thin film forming on semiconductor substrate | Nobuya Imazeki, Masaaki Oda | 1999-09-14 |
| 5851589 | Method for thermal chemical vapor deposition | Akitoshi Suzuki, Yoshiro Kusumoto, Kazuo Takakuwa, Tetsuya Ikuta | 1998-12-22 |
| 5795831 | Cold processes for cleaning and stripping photoresist from surfaces of semiconductor wafers | Yukio Masuda, Richard L. Bersin, Han Xu, Quain Geng | 1998-08-18 |
| 5244501 | Apparatus for chemical vapor deposition | Akitoshi Suzuki, Hiroyuki Nawa, Motohiro Kaneko, Yoshiro Kusumoto, Kazuo Takakuwa +1 more | 1993-09-14 |
| 5125360 | Vacuum processing apparatus | Akitoshi Suzuki, Hiroyuki Nawa, Motohiro Kaneko | 1992-06-30 |
| 4994301 | ACVD (chemical vapor deposition) method for selectively depositing metal on a substrate | Yoshiro Kusumoto, Kazuo Takakuwa, Tetsuya Ikuta, Akitoshi Suzuki | 1991-02-19 |
| 4924807 | Apparatus for chemical vapor deposition | Akitoshi Suzuki, Hiroyuki Nawa, Motohiro Kaneko, Yoshiro Kusumoto, Kazuo Takakuwa +1 more | 1990-05-15 |
| 4902531 | Vacuum processing method and apparatus | Akitoshi Suzuki, Hiroyuki Nawa, Motohiro Kaneko | 1990-02-20 |
| 4849260 | Method for selectively depositing metal on a substrate | Yoshiro Kusumoto, Kazuo Takakuwa, Tetsuya Ikuta, Akitoshi Suzuki | 1989-07-18 |
| 4800105 | Method of forming a thin film by chemical vapor deposition | Akitoshi Suzuki, Yoshiro Kusumoto, Kazuo Takakuwa, Tetsuya Ikuta | 1989-01-24 |