Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5908319 | Cleaning and stripping of photoresist from surfaces of semiconductor wafers | Han Xu | 1999-06-01 |
| 5882489 | Processes for cleaning and stripping photoresist from surfaces of semiconductor wafers | Han Xu | 1999-03-16 |
| 5795831 | Cold processes for cleaning and stripping photoresist from surfaces of semiconductor wafers | Izumi Nakayama, Yukio Masuda, Han Xu, Quain Geng | 1998-08-18 |
| 5228052 | Plasma ashing apparatus | Masashi Kikuchi, Masaki Uematsu | 1993-07-13 |
| 5099100 | Plasma etching device and process | Michael Singleton | 1992-03-24 |
| 4699689 | Method and apparatus for dry processing of substrates | — | 1987-10-13 |
| 4689112 | Method and apparatus for dry processing of substrates | — | 1987-08-25 |
| 4687544 | Method and apparatus for dry processing of substrates | — | 1987-08-18 |
| 4364413 | Molar gas-flow controller | William H. Clouser | 1982-12-21 |
| 4303467 | Process and gas for treatment of semiconductor devices | Frank Scornavacca | 1981-12-01 |