Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398465 | Ceramic heater | Tomohiro HARA | 2025-08-26 |
| 12170190 | Wafer support table and RF rod | Tomohiro HARA | 2024-12-17 |
| 11956863 | Multi-zone heater | Nobuyuki Kondou | 2024-04-09 |
| 11688590 | Electrostatic-chuck heater | Reo WATANABE | 2023-06-27 |
| 11664203 | Electrostatic-chuck heater | Reo WATANABE | 2023-05-30 |
| 11602012 | Wafer placement table and method for manufacturing the same | Shuichiro Motoyama | 2023-03-07 |
| 11574822 | Wafer support table with ceramic substrate including core and surface layer | Shuichiro Motoyama | 2023-02-07 |
| 11483901 | Ceramic heater | — | 2022-10-25 |
| 11367631 | Ceramic heater and manufacturing method for tubular shaft | — | 2022-06-21 |
| 11223302 | Electrostatic chuck having an annular outer region covered by an insulating film | Reo WATANABE, Nobuyuki Kondou | 2022-01-11 |
| 10861680 | Wafer support | Daiki Maeda | 2020-12-08 |
| 10566218 | Ceramic heater | Hiroshi Takebayashi | 2020-02-18 |
| 9548226 | Member for semiconductor manufacturing apparatus and method for manufacturing the same | Tetsuhisa Abe | 2017-01-17 |
| 9123757 | Heating device and semiconductor manufacturing apparatus | Junya Waki | 2015-09-01 |
| 8394199 | Processing device | Yasumitsu Tomita | 2013-03-12 |
| 8193473 | Uniform temperature heater | — | 2012-06-05 |
| 7948516 | Position accuracy evaluation method and position accuracy evaluation apparatus | Taiji Kiku | 2011-05-24 |
| 7686889 | Susceptor for semiconductor manufacturing apparatus | Taiji Kiku | 2010-03-30 |
| 7632356 | Gas providing member and processing device | Yasumitsu Tomita | 2009-12-15 |
| 7560668 | Substrate processing device | Yasumitsu Tomita | 2009-07-14 |
| 7432474 | Heating device | Yoshinobu Goto | 2008-10-07 |
| 7401399 | Method of manufacturing a substrate heating device | Yoshinobu Goto, Taiji Kiku | 2008-07-22 |
| 7345260 | Heater and method of manufacturing the same | — | 2008-03-18 |
| 7279661 | Heating apparatus | Hisakazu Okajima, Keiji Kawasaki | 2007-10-09 |
| 7173220 | Heating device | Yoshinobu Goto | 2007-02-06 |