Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8394199 | Processing device | Yutaka Unno | 2013-03-12 |
| 7632356 | Gas providing member and processing device | Yutaka Unno | 2009-12-15 |
| 7582184 | Plasma processing member | Hideyoshi Tsuruta | 2009-09-01 |
| 7560668 | Substrate processing device | Yutaka Unno | 2009-07-14 |