Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7948516 | Position accuracy evaluation method and position accuracy evaluation apparatus | Yutaka Unno | 2011-05-24 |
| 7686889 | Susceptor for semiconductor manufacturing apparatus | Yutaka Unno | 2010-03-30 |
| 7401399 | Method of manufacturing a substrate heating device | Yutaka Unno, Yoshinobu Goto | 2008-07-22 |
| 7288020 | Method of blasting process | — | 2007-10-30 |
| 7261780 | Ceramic susceptor and a method of cleaning the same | Akiyoshi Hattori | 2007-08-28 |
| 7211156 | Method for cleaning a ceramic member for use in a system for producing semiconductors, a cleaning agent and a combination of cleaning agents | Shinji Yamaguchi, Nobuyuki Kondou | 2007-05-01 |
| 6855576 | Method for cleaning a ceramic member for use in a system for producing semiconductors, a cleaning agent and a combination of cleaning agents | Shinji Yamaguchi, Nobuyuki Kondou | 2005-02-15 |