Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7432474 | Heating device | Yutaka Unno | 2008-10-07 |
| 7401399 | Method of manufacturing a substrate heating device | Yutaka Unno, Taiji Kiku | 2008-07-22 |
| 7332694 | Heating resistances and heaters | — | 2008-02-19 |
| 7274006 | Heater | Hisakazu Okajima | 2007-09-25 |
| 7247819 | Substrate heating apparatus | Hideyoshi Tsuruta | 2007-07-24 |
| 7220320 | Systems for producing semiconductors and members therefor | Hideyoshi Tsuruta | 2007-05-22 |
| 7189946 | Substrate heating device | Hideyoshi Tsuruta | 2007-03-13 |
| 7173220 | Heating device | Yutaka Unno | 2007-02-06 |
| 7157666 | Systems for producing semiconductors and members therefor | Hideyoshi Tsuruta | 2007-01-02 |
| 7126093 | Heating systems | Hideyoshi Tsuruta | 2006-10-24 |
| 7115839 | Heaters | — | 2006-10-03 |
| 7053339 | Ceramic heater | — | 2006-05-30 |
| 7044399 | Heating systems | Hideyoshi Tsuruta | 2006-05-16 |
| 7022947 | Systems for supporting ceramic susceptors | Kazuaki Yamaguchi, Hideyoshi Tsuruta | 2006-04-04 |
| 7011712 | Fixing structures and supporting structures of ceramic susceptors, and supporting members thereof | Kazuaki Yamaguchi | 2006-03-14 |
| 6997993 | Susceptor supporting construction | Kazuaki Yamaguchi | 2006-02-14 |
| 6979369 | Fixing structures and supporting structures of ceramic susceptors, and supporting members thereof | Kazuaki Yamaguchi | 2005-12-27 |
| 6875960 | Heating system | Shinji Yamaguchi, Hisakazu Okajima, Yutaka Unno | 2005-04-05 |
| 5941302 | Ceramic shell-and-tube type heat exchanger and method for manufacturing the same | Mitsuru Hattori | 1999-08-24 |