Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7687824 | Method of improving surface flatness of group-III nitride crystal, substrate for epitaxial growth, and semiconductor device | Tomohiko Shibata, Shigeaki Sumiya | 2010-03-30 |
| 7438761 | Apparatus for fabricating a III-V nitride film and a method for fabricating the same | Tomohiko Shibata, Mitsuhiro Tanaka | 2008-10-21 |
| 7067847 | Semiconductor element | Tomohiko Shibata, Yukinori Nakamura, Mitsuhiro Tanaka | 2006-06-27 |
| 7033439 | Apparatus for fabricating a III-V nitride film and a method for fabricating the same | Tomohiko Shibata, Mitsuhiro Tanaka | 2006-04-25 |
| 6989202 | Method for fabricating a III nitride film, an underlayer for fabricating a III nitride film and a method for fabricating the same underlayer | Tomohiko Shibata, Yukinori Nakamura, Mitsuhiro Tanaka | 2006-01-24 |
| 6869702 | Substrate for epitaxial growth | Tomohiko Shibata, Shigeaki Sumiya, Mitsuhiro Tanaka | 2005-03-22 |
| 6844611 | III nitride epitaxial substrate, epitaxial substrate for III nitride element, and III nitride element that includes a surface nitride layer formed on the main surface of a sapphire single crystal | Tomohiko Shibata, Shigeaki Sumiya, Mitsuhiro Tanaka | 2005-01-18 |
| 6805982 | Epitaxial substrates and semiconductor devices | Tomohiko Shibata, Shigeaki Sumiya, Mitsuhiro Tanaka | 2004-10-19 |
| 6770914 | III nitride semiconductor substrate for ELO | Tomohiko Shibata, Shigeaki Sumiya, Mitsuhiro Tanaka | 2004-08-03 |
| 6765244 | III nitride film and a III nitride multilayer | Tomohiko Shibata, Shigeaki Sumiya, Mitsuhiro Tanaka | 2004-07-20 |
| 6727164 | Method for fabricating a semiconducting nitride film, susceptor tray, and apparatus for fabricating a semiconducting nitride film | Tomohiko Shibata, Yukinori Nakamura, Mitsuhiro Tanaka | 2004-04-27 |
| 6706620 | Method for fabricating a nitride film | Tomohiko Shibata, Mitsuhiro Tanaka, Osamu Oda | 2004-03-16 |
| 6703255 | Method for fabricating a III nitride film | Tomohiko Shibata, Shigeaki Sumiya, Mitsuhiro Tanaka | 2004-03-09 |
| 6703649 | Semiconductor element | Tomohiko Shibata, Osamu Oda, Mitsuhiro Tanaka | 2004-03-09 |
| 6649493 | Method for fabricating a III nitride film, and underlayer for fabricating a III nitride film and a method for fabricating the same underlayer | Tomohiko Shibata, Yukinori Nakamura, Mitsuhiro Tanaka | 2003-11-18 |
| 6597023 | Semiconductor light-detecting element | Tomohiko Shibata, Shigeaki Sumiya, Mitsuhiro Tanaka | 2003-07-22 |
| 6554896 | Epitaxial growth substrate and a method for producing the same | Tomohiko Shibata, Yukinori Nakamura | 2003-04-29 |
| 6495894 | Photonic device, a substrate for fabricating a photonic device, a method for fabricating the photonic device and a method for manufacturing the photonic device-fabricating substrate | Tomohiko Shibata, Teruyo Nagai, Mitsuhiro Tanaka | 2002-12-17 |
| 6492191 | Method for manufacturing an A1xGayInzN film using a metal film for heat radiation | Tomohiko Shibata, Teruyo Nagai, Mitsuhiro Tanaka | 2002-12-10 |
| 6426519 | Epitaxial growth substrate and a method for producing the same | Tomohiko Shibata, Yukinori Nakamura | 2002-07-30 |