Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8268079 | Vacuum film deposition apparatus | Makoto Kashiwaya, Takashi Kataoka, Hiroshi Sohda | 2012-09-18 |
| 7955437 | Apparatus for fabricating a III-V nitride film | Tomohiko Shibata, Mitsuhiro Tanaka | 2011-06-07 |
| 7883750 | Thin films and a method for producing the same | Takao Saito, Yoshimasa Kondo, Naoto Ohtake | 2011-02-08 |
| 7303789 | Methods for producing thin films on substrates by plasma CVD | Takao Saito, Yoshimasa Kondo, Naoto Ohtake | 2007-12-04 |
| 7067847 | Semiconductor element | Tomohiko Shibata, Keiichiro Asai, Mitsuhiro Tanaka | 2006-06-27 |
| 6989202 | Method for fabricating a III nitride film, an underlayer for fabricating a III nitride film and a method for fabricating the same underlayer | Keiichiro Asai, Tomohiko Shibata, Mitsuhiro Tanaka | 2006-01-24 |
| 6815867 | Substrate usable for an acoustic surface wave device, a method for fabricating the same substrate and an acoustic surface wave device having the same substrate | Tomohiko Shibata, Mitsuhiro Tanaka | 2004-11-09 |
| 6759715 | Epitaxial base substrate and epitaxial substrate | Tomohiko Shibata, Mitsuhiro Tanaka, Osamu Oda | 2004-07-06 |
| 6727164 | Method for fabricating a semiconducting nitride film, susceptor tray, and apparatus for fabricating a semiconducting nitride film | Tomohiko Shibata, Mitsuhiro Tanaka, Keiichiro Asai | 2004-04-27 |
| 6709703 | Method for fabricating a III-V nitride film and an apparatus for fabricating the same | Tomohiko Shibata, Mitsuhiro Tanaka | 2004-03-23 |
| 6649493 | Method for fabricating a III nitride film, and underlayer for fabricating a III nitride film and a method for fabricating the same underlayer | Keiichiro Asai, Tomohiko Shibata, Mitsuhiro Tanaka | 2003-11-18 |
| 6649288 | Nitride film | Tomohiko Shibata, Mitsuhiro Tanaka | 2003-11-18 |
| 6623877 | III nitride epitaxial wafer and usage of the same | Tomohiko Shibata, Mitsuhiro Tanaka | 2003-09-23 |
| 6554896 | Epitaxial growth substrate and a method for producing the same | Keiichiro Asai, Tomohiko Shibata | 2003-04-29 |
| 6426519 | Epitaxial growth substrate and a method for producing the same | Keiichiro Asai, Tomohiko Shibata | 2002-07-30 |
| 6342748 | Surface acoustic wave device, substrate therefor and method of manufacturing the substrate | Tomohiko Shibata | 2002-01-29 |
| 6183555 | Surface acoustic wave device, substrate therefor, and method of manufacturing the substrate | Tomohiko Shibata | 2001-02-06 |
| 5936329 | Surface acoustic wave device, substrate therefor, and method of manufacturing the substrate | Tomohiko Shibata | 1999-08-10 |
| 4591322 | Eccentric archimedian screw pump of rotary displacement type | Tsuneo Ono | 1986-05-27 |