Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7919405 | Semiconductor device and manufacturing method thereof | — | 2011-04-05 |
| 7675119 | Semiconductor device and manufacturing method thereof | — | 2010-03-09 |
| 7563698 | Method for manufacturing semiconductor device | — | 2009-07-21 |
| 7504698 | Semiconductor device and manufacturing method thereof | — | 2009-03-17 |
| 7078747 | Semiconductor device having a HMP metal gate | — | 2006-07-18 |
| 7078777 | Semiconductor device having a low-resistance gate electrode | — | 2006-07-18 |
| 6800543 | Semiconductor device having a low-resistance gate electrode | — | 2004-10-05 |
| 6624582 | Method of an apparatus for performing circuit-processing, method of and apparatus for controlling the motion of the circuit-processing performance apparatus, and information storage medium | — | 2003-09-23 |
| 6613669 | Semiconductor device and method for manufacturing the same | — | 2003-09-02 |
| 6589873 | Process for manufacturing a semiconductor device | — | 2003-07-08 |
| 6569759 | Semiconductor device having interconnection implemented by refractory metal nitride layer and refractory metal silicide layer and process of fabrication thereof | — | 2003-05-27 |
| 6475907 | Semiconductor device having a barrier metal layer and method for manufacturing the same | — | 2002-11-05 |
| 6440828 | Process of fabricating semiconductor device having low-resistive contact without high temperature heat treatment | Shunichiro Sato, Toshiki Shinmura, Yoshiaki Yamada, Koji Urabe | 2002-08-27 |
| 6432493 | Method of carrying out plasma-enhanced chemical vapor deposition | — | 2002-08-13 |
| 6404058 | Semiconductor device having interconnection implemented by refractory metal nitride layer and refractory metal silicide layer and process of fabrication thereof | — | 2002-06-11 |
| 6204170 | Method for manufacturing semiconductor device having metal silicide film and metal film in which metal film can be selectively removed | — | 2001-03-20 |
| 6176936 | In-situ chamber cleaning method of CVD apparatus | — | 2001-01-23 |
| 6167836 | Plasma-enhanced chemical vapor deposition apparatus | — | 2001-01-02 |
| 6107190 | Method of fabricating semiconductor device | Yoshiaki Yamada | 2000-08-22 |
| 6020254 | Method of fabricating semiconductor devices with contact holes | — | 2000-02-01 |