Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5179863 | Method and apparatus for setting the gap distance between a mask and a wafer at a predetermined distance | Nobutaka Kikuiri | 1993-01-19 |
| 5134640 | Synchrotron radiation apparatus | Toshio Hirokawa, Osamu Kuwabara, Nobutaka Kikuiri | 1992-07-28 |
| 5130747 | Carrier apparatus | Nobutaka Kikuiri | 1992-07-14 |
| 4848911 | Method for aligning first and second objects, relative to each other, and apparatus for practicing this method | Yoriyuki Ishibashi, Masayuki Masuyama | 1989-07-18 |
| 4838693 | Method and apparatus for setting a gap between first and second objects to a predetermined distance | Yoriyuki Ishibashi, Ryoichi Hirano, Masayuki Masuyama, Hiroaki Shimozono | 1989-06-13 |