Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6336463 | Cleaning/drying station and production line for semiconductor devices | — | 2002-01-08 |
| 6328768 | Semiconductor device manufacturing line | — | 2001-12-11 |
| 6322597 | Semiconductor fabrication line with contamination preventing function | — | 2001-11-27 |
| 5549798 | Wet processing apparatus having individual reactivating feedback paths for anode and cathode water | Hiroshi Kitajima, Hidemitsu Aoki, Haruto Hamano, Makoto Morita, Yoshimi Shiramizu +6 more | 1996-08-27 |