Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968434 | Method of forming of a semiconductor film, method of manufacture of a semiconductor device and a semiconductor device | Krishna C. Saraswat | 2011-06-28 |
| 7923384 | Formation method of porous insulating film, manufacturing apparatus of semiconductor device, manufacturing method of semiconductor device, and semiconductor device | Naoya Furutake, Tsuneo Takeuchi, Yoshihiro Hayashi | 2011-04-12 |
| 7867906 | Semiconductor device and method for manufacturing same | Mari Amano, Naoya Furutake, Yoshihiro Hayashi | 2011-01-11 |
| 7701060 | Wiring structure and method for manufacturing the same | Yoshihiro Hayashi, Yoshimichi Harada, Fuminori Ito, Hiroto Ohtake, Tatsuya Usami | 2010-04-20 |
| 7622808 | Semiconductor device and having trench interconnection | Hiroto Ohtake, Masayoshi Tagami, Yoshihiro Hayashi | 2009-11-24 |
| 7482694 | Semiconductor device and its manufacturing method | Hiroto Ohtake, Yoshimichi Harada, Kenichiro Hijioka, Shinobu Saitoh, Yoshihiro Hayashi | 2009-01-27 |
| 6972453 | Method of manufacturing a semiconductor device capable of etching a multi-layer of organic films at a high selectivity | Hiroto Ohtake, Shinobu Saitoh, Yoshihiro Hayashi | 2005-12-06 |