Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8591991 | Fabrication method and fabrication apparatus for fabricating metal oxide thin film | Hiroshi Nishiyama, Masatoshi Tsukichi, Yasunobu Inoue, Masasuke Takata | 2013-11-26 |
| 8574676 | Substrate processing method | Hiroshi Nishiyama, Yasunobu Inoue, Mitsuru Ushijima, Katsuhiko Iwabuchi | 2013-11-05 |